RF 마그네트론 스퍼터링 방법으로 SiO2/Si(100)기판위에 성장시킨 ZnO 박막의 구조 및 광특성Structural and optical properties of ZnO thin films grown on SiO2/Si(100) substrates by RF magnetron sputtering

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DC FieldValueLanguage
dc.contributor.author한석규ko
dc.contributor.author홍순구ko
dc.contributor.author김효진ko
dc.contributor.author이정용ko
dc.contributor.author이재욱ko
dc.date.accessioned2013-03-08T12:23:54Z-
dc.date.available2013-03-08T12:23:54Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2006-06-
dc.identifier.citation한국재료학회지, v.16, no.6, pp.360 - 366-
dc.identifier.issn1225-0562-
dc.identifier.urihttp://hdl.handle.net/10203/92998-
dc.languageKorean-
dc.publisher한국재료학회-
dc.titleRF 마그네트론 스퍼터링 방법으로 SiO2/Si(100)기판위에 성장시킨 ZnO 박막의 구조 및 광특성-
dc.title.alternativeStructural and optical properties of ZnO thin films grown on SiO2/Si(100) substrates by RF magnetron sputtering-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume16-
dc.citation.issue6-
dc.citation.beginningpage360-
dc.citation.endingpage366-
dc.citation.publicationname한국재료학회지-
dc.identifier.kciidART001013323-
dc.contributor.localauthor이정용-
dc.contributor.nonIdAuthor한석규-
dc.contributor.nonIdAuthor홍순구-
dc.contributor.nonIdAuthor김효진-
dc.contributor.nonIdAuthor이재욱-
dc.subject.keywordAuthorZnO-
dc.subject.keywordAuthorRF magnetron sputtering-
dc.subject.keywordAuthorPL-
dc.subject.keywordAuthorTEM-
dc.subject.keywordAuthorgrain size-
dc.subject.keywordAuthorgrain boundary-
dc.subject.keywordAuthornonradiation recombination-
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MS-Journal Papers(저널논문)
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