DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, HS | ko |
dc.contributor.author | Kim, Ho Gi | ko |
dc.contributor.author | Kim, Il-Doo | ko |
dc.contributor.author | Kim, KB | ko |
dc.contributor.author | Lee, JC | ko |
dc.date.accessioned | 2013-03-08T07:40:12Z | - |
dc.date.available | 2013-03-08T07:40:12Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2005-11 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.87, pp.39468 - 39473 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/92497 | - |
dc.description.abstract | In this Letter, we report on high-tunability and low-microwave-loss properties of Ba0.6Sr0.4TiO3 (BST) thin films by use of atomic-layer-deposited TiO2 films as the microwave buffer layer between BST and high-resistivity Si substrate. The interdigital capacitor fabricated on BST films grown on TiO2/high resistivity Si (2 k Omega cm) substrates showed the much enhanced tunability value of 33.2% while retaining an appropriate Q factor, as compared to the tunability values of BST (21%) films grown on MgO single-crystal substrates and BST (8.2%) films grown on TiO2/normal Si (10 Omega cm) substrates. The coplanar waveguide BST phase shifter fabricated on TiO2/high resistivity Si exhibited a phase shift of 95 degrees and insertion loss of 3.09 dB at 15 GHz and an applied voltage of 50 V. ALD-grown TiO2 buffer layers enable the successful integration of BST-based microwave tunable devices onto high-resistivity Si wafers. (c) 2005 American Institute of Physics. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | TA2O5 | - |
dc.title | High-tunability and low-microwave-loss Ba0.6Sr0.4TiO3 thin films grown on high-resistivity Si substrates using TiO2 buffer layers | - |
dc.type | Article | - |
dc.identifier.wosid | 000233362300060 | - |
dc.identifier.scopusid | 2-s2.0-27844580370 | - |
dc.type.rims | ART | - |
dc.citation.volume | 87 | - |
dc.citation.beginningpage | 39468 | - |
dc.citation.endingpage | 39473 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.2133888 | - |
dc.contributor.localauthor | Kim, Ho Gi | - |
dc.contributor.localauthor | Kim, Il-Doo | - |
dc.contributor.nonIdAuthor | Kim, HS | - |
dc.contributor.nonIdAuthor | Kim, KB | - |
dc.contributor.nonIdAuthor | Lee, JC | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | TA2O5 | - |
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