The field of BioNano/Micro System applies both nanotechnology and MEMS (microelectromechanical systems) to solve
biological and medical problems as well as biological structures and principles to solve engineering MEMS problems. In this paper, some technical efforts to develop nanobiotechnology, focusing on nanobiosensor, microfluidics and lab-on-a-chip are briefly reviewed. In order to ensure continued success of the BioNano/Micro System in the commercial arena, several key issues need our attention. One of the important things is to the understanding of Nature, biological sciences and to the application of wellestablishing conventional technology platform and infrastructure for commercialization.