Improvement of electrical and optical properties of ZnO thin films prepared by MOCVD using UV light irradiation and in situ H-2 post-treatment
We have investigated the effect of ultraviolet (UV) light irradiation during the deposition of nominally undoped ZnO thin films using metalorganic chemical vapor deposition (MOCVD) and/or in situ hydrogen post-treatment. Due to the desorption of oxygen and incorporation of hydrogen as a shallow donor at the surface, the ZnO film prepared by the photo-MOCVD and in situ hydrogen post-treatment shows the highest film quality as a transparent conductive electrode for thin-film solar cells. (C) 2004 Elsevier B.V. All rights reserved.
- Publisher
- ELSEVIER SCIENCE BV
- Issue Date
- 2005-02
- Language
- English
- Article Type
- Article
- Keywords
ZINC-OXIDE FILMS; HYDROGEN; DEPOSITION
- Citation
SOLAR ENERGY MATERIALS AND SOLAR CELLS, v.86, pp.105 - 112
- ISSN
- 0927-0248
- Appears in Collection
- EE-Journal Papers(저널논문)
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