DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ye, SH | ko |
dc.contributor.author | Kim, Soohyun | ko |
dc.contributor.author | Kwak, Yoon Keun | ko |
dc.contributor.author | Cho, HM | ko |
dc.contributor.author | Cho, YJ | ko |
dc.contributor.author | Chegal, W | ko |
dc.date.accessioned | 2013-03-07T10:47:53Z | - |
dc.date.available | 2013-03-07T10:47:53Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-12 | - |
dc.identifier.citation | OPTICS EXPRESS, v.15, no.26, pp.18056 - 18065 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10203/89994 | - |
dc.description.abstract | An ellipsometric data acquisition method is introduced to measure the optical properties of sample. It is based on a microellipsometer hardware layout integrated a high numerical aperture objective lens, which is aligned in the normal direction of sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub-mu m probe beam size, moreover real-time measurement is possible due to no moving parts. The experimental results of different SiO2 thin film are demonstrated, also calibration technique is described. (c) 2007 Optical Society of America. | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.subject | BEAM PROFILE REFLECTOMETRY | - |
dc.subject | IMAGING MICROELLIPSOMETRY | - |
dc.subject | ELLIPSOMETRY | - |
dc.subject | SILICON | - |
dc.subject | MICROSCOPY | - |
dc.subject | RESOLUTION | - |
dc.title | Angle-resolved annular data acquisition method for microellipsometry | - |
dc.type | Article | - |
dc.identifier.wosid | 000252045400065 | - |
dc.identifier.scopusid | 2-s2.0-37549054731 | - |
dc.type.rims | ART | - |
dc.citation.volume | 15 | - |
dc.citation.issue | 26 | - |
dc.citation.beginningpage | 18056 | - |
dc.citation.endingpage | 18065 | - |
dc.citation.publicationname | OPTICS EXPRESS | - |
dc.identifier.doi | 10.1364/OE.15.018056 | - |
dc.contributor.localauthor | Kim, Soohyun | - |
dc.contributor.localauthor | Kwak, Yoon Keun | - |
dc.contributor.nonIdAuthor | Ye, SH | - |
dc.contributor.nonIdAuthor | Cho, HM | - |
dc.contributor.nonIdAuthor | Cho, YJ | - |
dc.contributor.nonIdAuthor | Chegal, W | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | BEAM PROFILE REFLECTOMETRY | - |
dc.subject.keywordPlus | IMAGING MICROELLIPSOMETRY | - |
dc.subject.keywordPlus | ELLIPSOMETRY | - |
dc.subject.keywordPlus | SILICON | - |
dc.subject.keywordPlus | MICROSCOPY | - |
dc.subject.keywordPlus | RESOLUTION | - |
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