A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications

Abstract

In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin-film Cr adhesion layers between W and SiO2 film layers in the Bragg reflectors, particularly to enhance the adhesion in-between. As a result, the resonances were found to occur at 2.7-3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q-factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. (C) 2007 Wiley Periodicals, Inc.