BiFe1-xMnxO3 thin films were grown by pulsed laser deposition on Nb-doped SrTiO3 substrates. Piezoresponse force microscopy was utilized to investigate the piezoelectric properties of these films. The piezoelectric hysteric behavior of the films was confirmed at room temperature. It is further shown that the piezoelectric coefficient of BiFe1-xMnxO3 decreases rapidly as x increases initially, but it becomes saturated above x similar to 0.4. (c) 2006 Elsevier B.V. All rights reserved.