다양한 산화물 기판 위에 RF 마그네트론 스퍼터링 방법으로 성장된 ZnO 박막의 특성 비교Comparison on Properties of ZnO Thin Films Grown by RF Magnetron Sputtering on Various Oxide Substrates
- Publisher
- 한국전기전자재료학회
- Issue Date
- 2007-04
- Language
- Korean
- Citation
전기전자재료학회논문지, v.20, no.4, pp.289 - 293
- ISSN
- 1226-7945
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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