대면적 미세 형상의 측정/검사 시스템Measurement and Test System for Large-scale Object

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Publisher
한국정밀공학회
Issue Date
2005-05
Language
Korean
Citation

한국정밀공학회지, v.22, no.5, pp.21 - 27

ISSN
1225-9071
URI
http://hdl.handle.net/10203/87867
Appears in Collection
ME-Journal Papers(저널논문)
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