DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee D.-Y. | ko |
dc.contributor.author | Kim D.-M. | ko |
dc.contributor.author | Gweon, Dae-Gab | ko |
dc.date.accessioned | 2013-03-06T15:58:41Z | - |
dc.date.available | 2013-03-06T15:58:41Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v.45, no.3B, pp.2124 - 2127 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/87508 | - |
dc.description.abstract | An atomic force microscope (AFM) using a laser interferometer is regarded as one of the best solutions for the standardization of two dimensional length measurement systems. We propose a new two dimensional (2D) metrological AFM system, which uses an orthogonally decoupled XY scanner and a commercial AFM head. We designed a decoupled planar scanner having minimal parasitic errors, particularly crosstalk errors. The parasitic tilt error was measured and evaluated using an autocollimator. Furthermore, we evaluated the uncertainty of the combined system according to the Guide to the Expression of Uncertainty in Measurement. | - |
dc.language | English | - |
dc.publisher | INST PURE APPLIED PHYSICS | - |
dc.subject | SCANNING PROBE MICROSCOPE | - |
dc.subject | PITCH MEASUREMENTS | - |
dc.subject | RANGE | - |
dc.subject | CALIBRATION | - |
dc.subject | STANDARDS | - |
dc.title | Design and evaluation of two dimensional metrological atomic force microscope using a planar nanoscanner | - |
dc.type | Article | - |
dc.identifier.wosid | 000236624100057 | - |
dc.identifier.scopusid | 2-s2.0-33645530457 | - |
dc.type.rims | ART | - |
dc.citation.volume | 45 | - |
dc.citation.issue | 3B | - |
dc.citation.beginningpage | 2124 | - |
dc.citation.endingpage | 2127 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | - |
dc.identifier.doi | 10.1143/JJAP.45.2124 | - |
dc.contributor.localauthor | Gweon, Dae-Gab | - |
dc.contributor.nonIdAuthor | Lee D.-Y. | - |
dc.contributor.nonIdAuthor | Kim D.-M. | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | metrological atomic force microscope | - |
dc.subject.keywordAuthor | nanoscanner | - |
dc.subject.keywordAuthor | parasitic tilt error | - |
dc.subject.keywordAuthor | uncertainty | - |
dc.subject.keywordAuthor | laser interferometer | - |
dc.subject.keywordPlus | SCANNING PROBE MICROSCOPE | - |
dc.subject.keywordPlus | PITCH MEASUREMENTS | - |
dc.subject.keywordPlus | RANGE | - |
dc.subject.keywordPlus | CALIBRATION | - |
dc.subject.keywordPlus | STANDARDS | - |
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