DC Field | Value | Language |
---|---|---|
dc.contributor.author | Myung, HS | ko |
dc.contributor.author | Park, YS | ko |
dc.contributor.author | Hong, B | ko |
dc.contributor.author | Han, JG | ko |
dc.contributor.author | Kim, YH | ko |
dc.contributor.author | Lee, JeongYong | ko |
dc.contributor.author | Shaginyan, LR | ko |
dc.date.accessioned | 2013-03-06T10:35:41Z | - |
dc.date.available | 2013-03-06T10:35:41Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-01 | - |
dc.identifier.citation | THIN SOLID FILMS, v.494, pp.123 - 127 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://hdl.handle.net/10203/86707 | - |
dc.description.abstract | Hydrogen-free nanostructured carbon (nc-C) films were synthesized at various graphite target power densities using a closed field unbalanced magnetron sputtering system (CFUBM). The power density of each graphite target was varied from 10 to 30 W/cm(2) in Ar gas atmosphere with a fixed pressure of 0.4 Pa and a substrate bias voltage of -200 V. The aim of this study was to determine the relationship between the microstructure and physical properties of ne-C films as a function of the target power density. The film structures were examined by Raman spectroscopy, X-ray photoelectron spectroscopy and field emission scanning electron microscopy. The physical properties of the nc-C films were evaluated using a nano-indentation tester, a 4-point probe and a residual stress tester. The number of graphitic nano-cluster increased with increasing target power density and a good conductive nanostructured carbon film was obtained. The nc-C film deposited at a target power density of 30 W/cm(2) exhibited the minimum electrical resistivity. (c) 2005 Elsevier B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.subject | DIAMOND-LIKE CARBON | - |
dc.subject | A-C | - |
dc.subject | H FILMS | - |
dc.subject | PRESSURE | - |
dc.title | Effect of the target power density on the synthesis and physical properties of sputtered nc-C films | - |
dc.type | Article | - |
dc.identifier.wosid | 000233785600024 | - |
dc.identifier.scopusid | 2-s2.0-27944447311 | - |
dc.type.rims | ART | - |
dc.citation.volume | 494 | - |
dc.citation.beginningpage | 123 | - |
dc.citation.endingpage | 127 | - |
dc.citation.publicationname | THIN SOLID FILMS | - |
dc.identifier.doi | 10.1016/j.tsf.2005.07.170 | - |
dc.contributor.localauthor | Lee, JeongYong | - |
dc.contributor.nonIdAuthor | Myung, HS | - |
dc.contributor.nonIdAuthor | Park, YS | - |
dc.contributor.nonIdAuthor | Hong, B | - |
dc.contributor.nonIdAuthor | Han, JG | - |
dc.contributor.nonIdAuthor | Kim, YH | - |
dc.contributor.nonIdAuthor | Shaginyan, LR | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | nanostructured carbon | - |
dc.subject.keywordAuthor | nc-C | - |
dc.subject.keywordAuthor | sp(2) bonding | - |
dc.subject.keywordAuthor | CFUBM | - |
dc.subject.keywordPlus | DIAMOND-LIKE CARBON | - |
dc.subject.keywordPlus | A-C | - |
dc.subject.keywordPlus | H FILMS | - |
dc.subject.keywordPlus | PRESSURE | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.