DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, HS | ko |
dc.contributor.author | Kim, Il-Doo | ko |
dc.contributor.author | Kim, KB | ko |
dc.contributor.author | Yun, TS | ko |
dc.contributor.author | Lee, JC | ko |
dc.contributor.author | Tuller, HL | ko |
dc.contributor.author | Choi, WY | ko |
dc.contributor.author | Kim, Ho Gi | ko |
dc.date.accessioned | 2013-03-06T08:24:37Z | - |
dc.date.available | 2013-03-06T08:24:37Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2006-12 | - |
dc.identifier.citation | JOURNAL OF ELECTROCERAMICS, v.17, pp.421 - 425 | - |
dc.identifier.issn | 1385-3449 | - |
dc.identifier.uri | http://hdl.handle.net/10203/86442 | - |
dc.description.abstract | We report on high tunablity of Ba0.6Sr0.4TiO3 (BST) thin films realized through the use of atomic layer deposited TiO2 films as a microwave buffer layer between BST and a high resistivity (HR) Si substrate. Coplanar waveguide (CPW) meander-line phase shifters using BST/TiO2/HR-Si and BST/MgO structures exhibited a differential phase shift of 95 degrees and 24.4 degrees, respectively, at 15 GHz under an electric field of 10 kV/cm. The figure of merit of the phase shifters at 15 GHz was 30.6 degrees/dB for BST film grown on a TiO2/HR-Si substrate and 12.2 degrees/dB for BST film grown on a MgO single crystal substrate. These results constitute significant progress in integrating BST films with conventional silicon technology. | - |
dc.language | English | - |
dc.publisher | SPRINGER | - |
dc.subject | THIN-FILMS | - |
dc.subject | TA2O5 | - |
dc.title | Low frequency and microwave performances of Ba0.6Sr0.4TiO3 films on atomic layer deposited TiO2/high resistivity Si substrates | - |
dc.type | Article | - |
dc.identifier.wosid | 000243610600057 | - |
dc.identifier.scopusid | 2-s2.0-33847177692 | - |
dc.type.rims | ART | - |
dc.citation.volume | 17 | - |
dc.citation.beginningpage | 421 | - |
dc.citation.endingpage | 425 | - |
dc.citation.publicationname | JOURNAL OF ELECTROCERAMICS | - |
dc.identifier.doi | 10.1007/s10832-006-9336-z | - |
dc.contributor.localauthor | Kim, Il-Doo | - |
dc.contributor.localauthor | Kim, Ho Gi | - |
dc.contributor.nonIdAuthor | Kim, HS | - |
dc.contributor.nonIdAuthor | Kim, KB | - |
dc.contributor.nonIdAuthor | Yun, TS | - |
dc.contributor.nonIdAuthor | Lee, JC | - |
dc.contributor.nonIdAuthor | Tuller, HL | - |
dc.contributor.nonIdAuthor | Choi, WY | - |
dc.type.journalArticle | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | BST | - |
dc.subject.keywordAuthor | buffer layer | - |
dc.subject.keywordAuthor | coplanar waveguide | - |
dc.subject.keywordAuthor | phase shifter | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | TA2O5 | - |
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