DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jung, Yeon Sik | ko |
dc.contributor.author | Jung, Wonjoon | ko |
dc.contributor.author | Ross, C. A. | ko |
dc.date.accessioned | 2013-03-06T06:38:21Z | - |
dc.date.available | 2013-03-06T06:38:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2008-09 | - |
dc.identifier.citation | NANO LETTERS, v.8, no.9, pp.2975 - 2981 | - |
dc.identifier.issn | 1530-6984 | - |
dc.identifier.uri | http://hdl.handle.net/10203/86151 | - |
dc.description.abstract | The formation of well-controlled circular patterns on the nanoscale is important for the fabrication of a range of devices such as sensors, memories, lasers, transistors, and quantum devices. Concentric, smooth ring patterns with tunable dimensions have been formed from a cylinder-forming poly(styrene-b-dimethylsiloxane) (PS-PDMS) diblock copolymer under confinement in shallow circular trenches. The high etch selectivity between PS and PDMS facilitates pattern transfer, illustrated by the fabrication of arrays of ferromagnetic cobalt rings with a density of 1.1 X 10(9)/cm(2). The effects of confinement diameter and commensurability on the diameter and period of the concentric rings are analyzed using a free energy model that includes interfacial, strain, and bending energies. This work provides a simple process for the fabrication of nanoscale circular patterns with very narrow line width using a much coarser-scale template, and may facilitate the miniaturization of a variety of microelectronic devices. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.subject | BLOCK-COPOLYMER | - |
dc.subject | CYLINDRICAL CONFINEMENT | - |
dc.subject | RADICAL POLYMERIZATION | - |
dc.subject | PHASE | - |
dc.subject | LITHOGRAPHY | - |
dc.subject | FABRICATION | - |
dc.subject | CURRENTS | - |
dc.subject | ENERGY | - |
dc.subject | BLENDS | - |
dc.subject | ARRAYS | - |
dc.title | Nanofabricated concentric ring structures by templated self-assembly of a diblock copolymer | - |
dc.type | Article | - |
dc.identifier.wosid | 000259140200066 | - |
dc.identifier.scopusid | 2-s2.0-57249089760 | - |
dc.type.rims | ART | - |
dc.citation.volume | 8 | - |
dc.citation.issue | 9 | - |
dc.citation.beginningpage | 2975 | - |
dc.citation.endingpage | 2981 | - |
dc.citation.publicationname | NANO LETTERS | - |
dc.identifier.doi | 10.1021/nl802011w | - |
dc.contributor.localauthor | Jung, Yeon Sik | - |
dc.contributor.nonIdAuthor | Jung, Wonjoon | - |
dc.contributor.nonIdAuthor | Ross, C. A. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | BLOCK-COPOLYMER | - |
dc.subject.keywordPlus | CYLINDRICAL CONFINEMENT | - |
dc.subject.keywordPlus | RADICAL POLYMERIZATION | - |
dc.subject.keywordPlus | PHASE | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | CURRENTS | - |
dc.subject.keywordPlus | ENERGY | - |
dc.subject.keywordPlus | BLENDS | - |
dc.subject.keywordPlus | ARRAYS | - |
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