DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lim, YS | ko |
dc.contributor.author | Lee, JeongYong | ko |
dc.contributor.author | Kim, HS | ko |
dc.contributor.author | Moon, DW | ko |
dc.date.accessioned | 2013-03-06T04:42:28Z | - |
dc.date.available | 2013-03-06T04:42:28Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-04 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.80, no.14, pp.2481 - 2483 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/85831 | - |
dc.description.abstract | Anisotropic diffusion of Ge induced by nonuniform strain in SiGe/Si interfaces in the range of 700-850 degreesC is directly observed with medium-energy ion-scattering spectroscopy through its composition and strain profiles of atomic-layer depth resolution. For SiGe/Si interfaces with identical composition profiles but with different strain distributions, the anisotropic diffusion of Ge can be clearly correlated with the anisotropic relaxation of the nonuniform strain in the near-surface layer of several nm depth. The results suggest that atomic-scale strain control is critical to maintain abrupt SiGe/Si interfaces under thermal budget. (C) 2002 American Institute of Physics. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | RELAXATION | - |
dc.subject | ISLANDS | - |
dc.subject | SI(001) | - |
dc.title | Strain-induced anisotropic Ge diffusion in SiGe/Si superlattices | - |
dc.type | Article | - |
dc.identifier.wosid | 000174765900017 | - |
dc.identifier.scopusid | 2-s2.0-79956006859 | - |
dc.type.rims | ART | - |
dc.citation.volume | 80 | - |
dc.citation.issue | 14 | - |
dc.citation.beginningpage | 2481 | - |
dc.citation.endingpage | 2483 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.1465500 | - |
dc.contributor.localauthor | Lee, JeongYong | - |
dc.contributor.nonIdAuthor | Lim, YS | - |
dc.contributor.nonIdAuthor | Kim, HS | - |
dc.contributor.nonIdAuthor | Moon, DW | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | RELAXATION | - |
dc.subject.keywordPlus | ISLANDS | - |
dc.subject.keywordPlus | SI(001) | - |
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