DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Seung-Woo | ko |
dc.contributor.author | Rhee, H.-G. | ko |
dc.contributor.author | Chu, J.-Y. | ko |
dc.date.accessioned | 2013-03-05T02:19:32Z | - |
dc.date.available | 2013-03-05T02:19:32Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003 | - |
dc.identifier.citation | PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, v.27, no.2, pp.205 - 215 | - |
dc.identifier.issn | 0141-6359 | - |
dc.identifier.uri | http://hdl.handle.net/10203/85009 | - |
dc.description.abstract | We present a volumetric interferometer that has been specially designed to improve the measurement accuracy of the three-dimensional coordinate metrology by reducing excessive Abbe offsets. The interferometer is composed of two main parts; one is a three-dimensionally movable target and the other is a stationary two-dimensional array of photo-detectors. The target made of point diffraction sources emanates two spherical wavefronts, of which interference intensity is monitored by the photo-detectors. Applying phase shifting allows the phases of the photo-detectors to be precisely obtained, and the measured phases are fitted to a geometric model of multilateration so as to determine the xyz-location of the target by minimizing least square errors. A prototype built on a CMM demonstrates that the proposed interferometer is capable of measuring the xyz-coordinates of the probe with a volumetric uncertainty of less than 1.0 mum. (C) 2002 Elsevier Science Inc. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE INC | - |
dc.subject | SHIFTING INTERFEROMETRY | - |
dc.subject | ALGORITHM | - |
dc.title | Volumetric phase-measuring interferometer for three-dimensional coordinate metrology | - |
dc.type | Article | - |
dc.identifier.wosid | 000182335000012 | - |
dc.identifier.scopusid | 2-s2.0-0037377531 | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 205 | - |
dc.citation.endingpage | 215 | - |
dc.citation.publicationname | PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY | - |
dc.identifier.doi | 10.1016/S0141-6359(02)00228-3 | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Rhee, H.-G. | - |
dc.contributor.nonIdAuthor | Chu, J.-Y. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | volumetric interferometer | - |
dc.subject.keywordAuthor | phase measuring interferometry | - |
dc.subject.keywordAuthor | coordinatemetrology | - |
dc.subject.keywordAuthor | multilateration | - |
dc.subject.keywordAuthor | abbe offset | - |
dc.subject.keywordPlus | SHIFTING INTERFEROMETRY | - |
dc.subject.keywordPlus | ALGORITHM | - |
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