DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Joong Keun | ko |
dc.contributor.author | Kim, JH | ko |
dc.contributor.author | Choy, J | ko |
dc.contributor.author | Oh, DY | ko |
dc.date.accessioned | 2013-03-05T02:14:51Z | - |
dc.date.available | 2013-03-05T02:14:51Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-04 | - |
dc.identifier.citation | METALS AND MATERIALS INTERNATIONAL, v.9, no.2, pp.115 - 119 | - |
dc.identifier.issn | 1598-9623 | - |
dc.identifier.uri | http://hdl.handle.net/10203/84961 | - |
dc.description.abstract | The film growth of Cr thin film by DC-magnetron sputter deposition was investigated by experimentally measuring the evolution of grain size distribution and by computing the film growth using Monte Carlo simulation. The as-deposited Cr thin film by sputter deposition typically grows in a columnar grain structure at the substrate temperature 260℃, which is far lower than 0.3 Tm. The stagnation of columnar grain structure does not occur in the case of no-bias condition up to the investigated film thickness of about 800 nm. However, the application of a negative bias of 200 V results in a stagnation of columnar grain structure at film thickness of about 50 nm and at the deposition temperature of 260℃. This is believed to arise from the fact that the mobility of ad-atoms is greatly enhanced and the Ar+ ions pin the grain boundary as a result of bias application. | - |
dc.language | English | - |
dc.publisher | 대한금속·재료학회 | - |
dc.title | Effect of bias on the as-deposited grain structure of Cr thin film | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 115 | - |
dc.citation.endingpage | 119 | - |
dc.citation.publicationname | METALS AND MATERIALS INTERNATIONAL | - |
dc.contributor.localauthor | Park, Joong Keun | - |
dc.contributor.nonIdAuthor | Kim, JH | - |
dc.contributor.nonIdAuthor | Choy, J | - |
dc.contributor.nonIdAuthor | Oh, DY | - |
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