DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, WS | ko |
dc.contributor.author | Kwon, KC | ko |
dc.contributor.author | Kim, BK | ko |
dc.contributor.author | Cho, JH | ko |
dc.contributor.author | Youn, Sung-Kie | ko |
dc.date.accessioned | 2013-03-04T23:10:50Z | - |
dc.date.available | 2013-03-04T23:10:50Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-03 | - |
dc.identifier.citation | CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES, v.5, no.3, pp.279 - 286 | - |
dc.identifier.issn | 1526-1492 | - |
dc.identifier.uri | http://hdl.handle.net/10203/84478 | - |
dc.description.abstract | A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micromechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data. | - |
dc.language | English | - |
dc.publisher | TECH SCIENCE PRESS | - |
dc.subject | MICROELECTROMECHANICAL SYSTEMS | - |
dc.subject | DYNAMIC ANALYSIS | - |
dc.title | Frequency-shifting analysis of electrostatically tunable micro-mechanical actuator | - |
dc.type | Article | - |
dc.identifier.wosid | 000220369400007 | - |
dc.identifier.scopusid | 2-s2.0-8344245392 | - |
dc.type.rims | ART | - |
dc.citation.volume | 5 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 279 | - |
dc.citation.endingpage | 286 | - |
dc.citation.publicationname | CMES-COMPUTER MODELING IN ENGINEERING & SCIENCES | - |
dc.contributor.localauthor | Youn, Sung-Kie | - |
dc.contributor.nonIdAuthor | Lee, WS | - |
dc.contributor.nonIdAuthor | Kwon, KC | - |
dc.contributor.nonIdAuthor | Kim, BK | - |
dc.contributor.nonIdAuthor | Cho, JH | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | micro-mechanical actuator | - |
dc.subject.keywordAuthor | electrostatic field | - |
dc.subject.keywordAuthor | natural frequency shifting | - |
dc.subject.keywordAuthor | coupled field analysis | - |
dc.subject.keywordPlus | MICROELECTROMECHANICAL SYSTEMS | - |
dc.subject.keywordPlus | DYNAMIC ANALYSIS | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.