마이크로 디퓨저 내의 양 방향 동적 유동과 펌프 구동 주파수에 따른 유동정류 특성 연구

Abstract

This paper characterizes hi-directionally oscillating flow in planar microdiffusers in order to evaluate the frequency-dependent flow rectification performance of the microdiffusers. In the theoretical study, we analyze a hi-directionally oscillating flow in the planar microdiffuser. In the experimental study, we fabricate two different microdiffuser prototypes, having different neck widths of 100 ㎛ (D100) and 300 ㎛(D300), respectively. The experimental net flow rates are measured as 116.6 μι/min. and 344.4 μι/min. for D100 and D300, respectively. The experimental flow rate of D300 decreases at the oscillating flow frequencies higher than 90Hz, at which the net boundary layer thickness is reduced to the microdiffuser neck width. It is experimentally verified that the flow rectification performance and the net flow rate of the microdiffusers tend to decrease when the boundary layer thickness is smaller than the diffuser neck width.