자속경로 단면적 및 공극변화를 이용한 인던턴스형 초정밀 변위측정 시스템

Abstract

A variable air-gap type system is widely used for inductive precision position measurement systems. This type transducer has high sensitivity but lacks a linear measurement range due to structural nonlinearity. Furthermore, as measurement range increases, linearity error is also increased. The alternative is a variable overlap-area type system. The sensitivity of this type is determined by the initial air-gap dimension, keeps the original value and does not deteriorate linearity in spite of the variations of the measuring range.