DC Field | Value | Language |
---|---|---|
dc.contributor.author | Han, MG | ko |
dc.contributor.author | Park, YJ | ko |
dc.contributor.author | Kim, SH | ko |
dc.contributor.author | Yoo, BS | ko |
dc.contributor.author | Park, HyoHoon | ko |
dc.date.accessioned | 2013-03-04T20:52:39Z | - |
dc.date.available | 2013-03-04T20:52:39Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-03 | - |
dc.identifier.citation | JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v.14, no.3, pp.398 - 402 | - |
dc.identifier.issn | 0960-1317 | - |
dc.identifier.uri | http://hdl.handle.net/10203/84101 | - |
dc.description.abstract | We have investigated the effect of heat treatment on the thermal and chemical stability of photoresist microlenses which were made by a reflow method. The microlenses were formed by patterning a novolac-based photoresist (PR) to pillar shapes and by reflowing it at 140 degreesC. After reflowing, the microlenses were heat treated at a relatively high temperature between 250 degreesC and 350 degreesC. After the heat treatment, the fundamental functions as a lens were maintained for infrared laser beams with wavelengths above 800 nm, except volume shrinkage and increment of the refractive index. The heat-treated microlenses also were not attacked by methanol and acetone. Our results suggest wide application of the PR as a simple, cost effective and stable lens medium. | - |
dc.language | English | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | FABRICATION | - |
dc.subject | ARRAYS | - |
dc.subject | LENSES | - |
dc.title | Thermal and chemical stability of reflowed-photoresist microlenses | - |
dc.type | Article | - |
dc.identifier.wosid | 000220532700013 | - |
dc.identifier.scopusid | 2-s2.0-1642619076 | - |
dc.type.rims | ART | - |
dc.citation.volume | 14 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 398 | - |
dc.citation.endingpage | 402 | - |
dc.citation.publicationname | JOURNAL OF MICROMECHANICS AND MICROENGINEERING | - |
dc.identifier.doi | 10.1088/0960-1317/14/3/012 | - |
dc.contributor.localauthor | Park, HyoHoon | - |
dc.contributor.nonIdAuthor | Han, MG | - |
dc.contributor.nonIdAuthor | Park, YJ | - |
dc.contributor.nonIdAuthor | Kim, SH | - |
dc.contributor.nonIdAuthor | Yoo, BS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | ARRAYS | - |
dc.subject.keywordPlus | LENSES | - |
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