DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jeon, YA | ko |
dc.contributor.author | No, Kwangsoo | ko |
dc.contributor.author | Kim, JS | ko |
dc.contributor.author | Yoon, YS | ko |
dc.date.accessioned | 2013-03-04T19:35:33Z | - |
dc.date.available | 2013-03-04T19:35:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-08 | - |
dc.identifier.citation | METALS AND MATERIALS INTERNATIONAL, v.9, pp.383 - 387 | - |
dc.identifier.issn | 1598-9623 | - |
dc.identifier.uri | http://hdl.handle.net/10203/83858 | - |
dc.description.abstract | ZnO films for electronic applications were deposited by radio-frequency (rf) sputtering onto various metal bottom electrodes (Pt/Ti, W Ni) to investigate such structural properties as crystallinity and surface morphology. The crystallinity, surface morphology and composition of the as-deposited films were studied using X-ray diffraction (XRD), scanning electron microscopy (SEM) and Rutherford back-scattering spectrometry (RBS), respectively. The preferred orientation and surface morphologies were strongly influenced by the type of bottom electrodes. The ZnO films with (200) texturing deposited on Pt/Ti/SiO2/Si showed a smoother and smaller grain size than those deposited on W and Ni. The ZnO films on Pt and W electrodes exhibited compressive residual stress. | - |
dc.language | English | - |
dc.publisher | KOREAN INST METALS MATERIALS | - |
dc.title | Characteristics of ZnO thin film deposited on various metal bottom electrodes | - |
dc.type | Article | - |
dc.identifier.wosid | 000185012100009 | - |
dc.type.rims | ART | - |
dc.citation.volume | 9 | - |
dc.citation.beginningpage | 383 | - |
dc.citation.endingpage | 387 | - |
dc.citation.publicationname | METALS AND MATERIALS INTERNATIONAL | - |
dc.contributor.localauthor | No, Kwangsoo | - |
dc.contributor.nonIdAuthor | Jeon, YA | - |
dc.contributor.nonIdAuthor | Kim, JS | - |
dc.contributor.nonIdAuthor | Yoon, YS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | ZnO thin film | - |
dc.subject.keywordAuthor | various metal bottom electrodes | - |
dc.subject.keywordAuthor | radio-frequency (rf) sputtering | - |
dc.subject.keywordPlus | ZINC-OXIDE | - |
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