운모기판을 이용한 다결정 Si 전이막 성장 연구Growth of Transferable Polycrystalline Si Film on Mica Substrate

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dc.contributor.author엄지혜ko
dc.contributor.author안병태ko
dc.contributor.author전영권ko
dc.contributor.author박진우ko
dc.date.accessioned2013-03-04T18:44:52Z-
dc.date.available2013-03-04T18:44:52Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2004-05-
dc.identifier.citation한국재료학회지, v.14, no.5, pp.343 - 347-
dc.identifier.issn1225-0562-
dc.identifier.urihttp://hdl.handle.net/10203/83681-
dc.description.abstractWe investigated the growth feasibility of polycrystalline Si film on mica substrate for the transfer of the layer to a plastic substrate. The annealing temperature was limited up to because of crack development in the mica substrate. Amorphous Si film was deposited on mica substrate by PECVD and was crystallized by furnace annealing. During the annealing, bubbles were formed at the Si/mica interface. The bubble formation was avoided by the Ar-plasma treatment before amorphous Si deposition. A uniform and clean polycrystalline Si film was obtained by coating on the amorphous Si film and annealing at for 10 h. The conventional Si lithography was possible on the mica substrate and the devices fabricated on the substrate could be transferred to a plastic substrate.-
dc.languageKorean-
dc.publisher한국재료학회-
dc.title운모기판을 이용한 다결정 Si 전이막 성장 연구-
dc.title.alternativeGrowth of Transferable Polycrystalline Si Film on Mica Substrate-
dc.typeArticle-
dc.type.rimsART-
dc.citation.volume14-
dc.citation.issue5-
dc.citation.beginningpage343-
dc.citation.endingpage347-
dc.citation.publicationname한국재료학회지-
dc.identifier.kciidART000929791-
dc.contributor.localauthor안병태-
dc.contributor.nonIdAuthor엄지혜-
dc.contributor.nonIdAuthor전영권-
dc.contributor.nonIdAuthor박진우-
dc.subject.keywordAuthormica-
dc.subject.keywordAuthormetal induced crystallization-
dc.subject.keywordAuthortransferable Si film-
dc.subject.keywordAuthormica-
dc.subject.keywordAuthormetal induced crystallization-
dc.subject.keywordAuthortransferable Si film-
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MS-Journal Papers(저널논문)
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