Significant resonance characteristic improvements by combined use of thermal annealing and Co electrode in ZnO-based FBARs
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Yim, MY | ko |
| dc.contributor.author | Kim, DH | ko |
| dc.contributor.author | Chai, DK | ko |
| dc.contributor.author | Yoon, Giwan | ko |
| dc.date.accessioned | 2013-03-04T17:55:09Z | - |
| dc.date.available | 2013-03-04T17:55:09Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-11 | - |
| dc.identifier.citation | ELECTRONICS LETTERS, v.39, pp.1638 - 1640 | - |
| dc.identifier.issn | 0013-5194 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/83528 | - |
| dc.description.abstract | Resonance characteristics improvements by the combined use of thermal annealing of the W/SiO2 Bragg reflectors and Co electrodes in ZnO-based film bulk acoustic resonator (FBAR) devices are presented. Their resonance characteristics could be significantly improved by the thermal annealing particularly at 400degreesC/30 min. In addition, the use of Co electrodes has resulted in further improvement of the resonance characteristics, compared to the use of Al electrodes. | - |
| dc.language | English | - |
| dc.publisher | INST ENGINEERING TECHNOLOGY-IET | - |
| dc.title | Significant resonance characteristic improvements by combined use of thermal annealing and Co electrode in ZnO-based FBARs | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000186702300011 | - |
| dc.identifier.scopusid | 2-s2.0-0344550332 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 39 | - |
| dc.citation.beginningpage | 1638 | - |
| dc.citation.endingpage | 1640 | - |
| dc.citation.publicationname | ELECTRONICS LETTERS | - |
| dc.contributor.localauthor | Yoon, Giwan | - |
| dc.contributor.nonIdAuthor | Yim, MY | - |
| dc.contributor.nonIdAuthor | Kim, DH | - |
| dc.contributor.nonIdAuthor | Chai, DK | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | RESONATORS | - |
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