Measurement of mechanical properties of electroplated nickel thin film

Abstract

Electroplated nickel manufactured via the LIGA process, offers the possibility of stronger structure and connectors in a micro electro mechanical systems (MEMS). In this study, the mechanical properties of electroplated Nickel thin film were characterized using two methods; tension test and nano-indentation test. In tension test, a linear guided motor was used as actuator and the applied force was measured using a load cell. Strain was measured with a dual microscope that obtains the displacement of two separated zone by the tracking process of the image captured with CCD camera. In indentation test, elastic modulus was measured using a CSM(continuous stiffness measurement) module. Two types of specimen were prepared in the same wafer and tested after four months of aging, which reduces the variation of properties caused by fabrication condition and aging effect. The tension specimen is 15 mum thick and 300 mum wide. The indentation specimen is also 15 mum thick. Young's modulus were measured by two different testing methods and compared quantitatively.