DC Field | Value | Language |
---|---|---|
dc.contributor.author | Bai, KH | ko |
dc.contributor.author | Lee, DS | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.contributor.author | Uhm, HS | ko |
dc.date.accessioned | 2013-03-04T08:53:17Z | - |
dc.date.available | 2013-03-04T08:53:17Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-05 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.80, no.21, pp.3907 - 3909 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/82239 | - |
dc.description.abstract | We control the ion density ratio of [N+]/[N-2(+)] and investigate the relation between the ion ratio and the plasma parameters in inductively coupled plasma. We measure the electron energy distribution functions and the ion ratio in a N-2/He,Ar,Xe mixture system as a function of mixing ratio. We can control the ion ratio from 0.002 to 1.4, and the ion ratio is a strong function of electron temperature. We can calculate the ion ratio using a simple model, and the obtained results agree well with the measured values in N-2/He,Ar, but there is a large discrepancy in the N-2/Xe discharge. The non-Maxwellian structure of the electron energy distribution functions may be the reason for the discrepancy. (C) 2002 American Institute of Physics. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | RADIO-FREQUENCY DISCHARGES | - |
dc.subject | GRID SYSTEM | - |
dc.subject | ENERGY | - |
dc.subject | ARGON | - |
dc.subject | MIXTURES | - |
dc.subject | DISTRIBUTIONS | - |
dc.subject | DISSOCIATION | - |
dc.subject | PARAMETERS | - |
dc.subject | SUBSTRATE | - |
dc.subject | NITROGEN | - |
dc.title | Control and analysis of ion species in N-2 inductively coupled plasma with inert gas mixing | - |
dc.type | Article | - |
dc.identifier.wosid | 000175709000009 | - |
dc.identifier.scopusid | 2-s2.0-79955998273 | - |
dc.type.rims | ART | - |
dc.citation.volume | 80 | - |
dc.citation.issue | 21 | - |
dc.citation.beginningpage | 3907 | - |
dc.citation.endingpage | 3909 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.1479452 | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Bai, KH | - |
dc.contributor.nonIdAuthor | Lee, DS | - |
dc.contributor.nonIdAuthor | Uhm, HS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | RADIO-FREQUENCY DISCHARGES | - |
dc.subject.keywordPlus | GRID SYSTEM | - |
dc.subject.keywordPlus | ENERGY | - |
dc.subject.keywordPlus | ARGON | - |
dc.subject.keywordPlus | MIXTURES | - |
dc.subject.keywordPlus | DISTRIBUTIONS | - |
dc.subject.keywordPlus | DISSOCIATION | - |
dc.subject.keywordPlus | PARAMETERS | - |
dc.subject.keywordPlus | SUBSTRATE | - |
dc.subject.keywordPlus | NITROGEN | - |
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