DC Field | Value | Language |
---|---|---|
dc.contributor.author | 박상후 | ko |
dc.contributor.author | 임태우 | ko |
dc.contributor.author | 양동열 | ko |
dc.contributor.author | 공홍진 | ko |
dc.date.accessioned | 2013-03-04T03:20:56Z | - |
dc.date.available | 2013-03-04T03:20:56Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2004-06 | - |
dc.identifier.citation | 한국정밀공학회지, v.21, no.6, pp.153 - 159 | - |
dc.identifier.issn | 1225-9071 | - |
dc.identifier.uri | http://hdl.handle.net/10203/81712 | - |
dc.description.abstract | In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range of several micrometers with nano-scaled details. In the process, liquid-state resins are polymerized by two-photon absorption which is induced by femto-second laser. A thin gold layer was sputtered on a glass plate and then, designed patterns or figures were developed on the gold layer by newly developed top-down building approach. Generally, stamps fur nano-imprinting have been fabricated by using the costly electron-beam lithography process combined with a reactive ion-etching process. Through this study, the effectiveness of the improved nRP process is evaluated to make a stamp with the resolution of around 200nm with reduced cost. | - |
dc.language | Korean | - |
dc.publisher | 한국정밀공학회 | - |
dc.title | 나노 복화(複畵)공정의 역방향 적층법을 이용한 직접적 나노패턴 생성에 관한 연구 | - |
dc.title.alternative | Directly Nano-precision Feature Patterning on Thin Metal Layer using Top-down Building Approach in nRP Process | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.issue | 6 | - |
dc.citation.beginningpage | 153 | - |
dc.citation.endingpage | 159 | - |
dc.citation.publicationname | 한국정밀공학회지 | - |
dc.identifier.kciid | ART001098393 | - |
dc.contributor.localauthor | 양동열 | - |
dc.contributor.nonIdAuthor | 박상후 | - |
dc.contributor.nonIdAuthor | 임태우 | - |
dc.contributor.nonIdAuthor | 공홍진 | - |
dc.subject.keywordAuthor | Femto-second Laser(펨토초 레이저) | - |
dc.subject.keywordAuthor | Two-photon Polymerization(이광자흡수 경화) | - |
dc.subject.keywordAuthor | Nano Replication Printing Process(nRP | - |
dc.subject.keywordAuthor | 나노 복화공정) | - |
dc.subject.keywordAuthor | Stamp(스탬프) | - |
dc.subject.keywordAuthor | Top-down Building(역방향 적층) | - |
dc.subject.keywordAuthor | Femto-second Laser(펨토초 레이저) | - |
dc.subject.keywordAuthor | Two-photon Polymerization(이광자흡수 경화) | - |
dc.subject.keywordAuthor | Nano Replication Printing Process(nRP | - |
dc.subject.keywordAuthor | 나노 복화공정) | - |
dc.subject.keywordAuthor | Stamp(스탬프) | - |
dc.subject.keywordAuthor | Top-down Building(역방향 적층) | - |
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