DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yu, HY | ko |
dc.contributor.author | Li, MF | ko |
dc.contributor.author | Cho, Byung Jin | ko |
dc.contributor.author | Yeo, CC | ko |
dc.contributor.author | Joo, MS | ko |
dc.contributor.author | Kwong, DL | ko |
dc.contributor.author | Pan, JS | ko |
dc.contributor.author | Ang, CH | ko |
dc.contributor.author | Zheng, JZ | ko |
dc.contributor.author | Ramanathan, S | ko |
dc.date.accessioned | 2013-03-04T01:51:01Z | - |
dc.date.available | 2013-03-04T01:51:01Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-07 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v.81, no.2, pp.376 - 378 | - |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/10203/81376 | - |
dc.description.abstract | High-resolution x-ray photoelectron spectroscopy (XPS) was applied to characterize the electronic structures for a series of high-k materials (HfO2)(x)(Al2O3)(1-x) grown on (100) Si substrate with different HfO2 mole fraction x. Al 2p, Hf 4f, O 1s core levels spectra, valence band spectra, and O 1s energy loss all show continuous changes with x in (HfO2)(x)(Al2O3)(1-x). These data are used to estimate the energy gap (E-g) for (HfO2)(x)(Al2O3)(1-x), the valence band offset (DeltaE(nu)) and the conduction band offset (DeltaE(c)) between (HfO2)(x)(Al2O3)(1-x) and the (100) Si substrate. Our XPS results demonstrate that the values of E-g, DeltaE(nu), and DeltaE(c) for (HfO2)(x)(Al2O3)(1-x) change linearly with x. (C) 2002 American Institute of Physics. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | (100)SI | - |
dc.subject | ZRO2 | - |
dc.title | Energy gap and band alignment for (HfO2)(x)(Al2O3)(1-x) on (100) Si | - |
dc.type | Article | - |
dc.identifier.wosid | 000176487400064 | - |
dc.identifier.scopusid | 2-s2.0-79955987885 | - |
dc.type.rims | ART | - |
dc.citation.volume | 81 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 376 | - |
dc.citation.endingpage | 378 | - |
dc.citation.publicationname | APPLIED PHYSICS LETTERS | - |
dc.identifier.doi | 10.1063/1.1492024 | - |
dc.contributor.localauthor | Cho, Byung Jin | - |
dc.contributor.nonIdAuthor | Yu, HY | - |
dc.contributor.nonIdAuthor | Li, MF | - |
dc.contributor.nonIdAuthor | Yeo, CC | - |
dc.contributor.nonIdAuthor | Joo, MS | - |
dc.contributor.nonIdAuthor | Kwong, DL | - |
dc.contributor.nonIdAuthor | Pan, JS | - |
dc.contributor.nonIdAuthor | Ang, CH | - |
dc.contributor.nonIdAuthor | Zheng, JZ | - |
dc.contributor.nonIdAuthor | Ramanathan, S | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | (100)SI | - |
dc.subject.keywordPlus | ZRO2 | - |
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