Microscopic topographical analysis of tool vibration effects on diamond turned optical surfaces

Abstract

In diamond turning for the manufacture of optical surfaces, a certain degree of relative vibration is inevitably encountered between the tool and work, deteriorating the surface quality. In this paper we first describe how the tool vibration affects the surface profiles in microscopic level, and then propose a metrological scheme to identify any existence of tool vibration with a minimum effort of surface measurement and analysis. (C) 2002 Elsevier Science Inc. All rights reserved.