Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jun, KH | ko |
| dc.contributor.author | Kwak, JH | ko |
| dc.contributor.author | Lim, Koeng Su | ko |
| dc.date.accessioned | 2013-03-04T00:33:41Z | - |
| dc.date.available | 2013-03-04T00:33:41Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2003-06 | - |
| dc.identifier.citation | JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, v.20, pp.1060 - 1066 | - |
| dc.identifier.issn | 1084-7529 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/81097 | - |
| dc.description.abstract | We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range. (C) 2003 Optical Society of America. | - |
| dc.language | English | - |
| dc.publisher | OPTICAL SOC AMER | - |
| dc.subject | POLARIZATION | - |
| dc.title | Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry | - |
| dc.type | Article | - |
| dc.identifier.wosid | 000183131500011 | - |
| dc.identifier.scopusid | 2-s2.0-0043076201 | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 20 | - |
| dc.citation.beginningpage | 1060 | - |
| dc.citation.endingpage | 1066 | - |
| dc.citation.publicationname | JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | - |
| dc.contributor.localauthor | Lim, Koeng Su | - |
| dc.contributor.nonIdAuthor | Jun, KH | - |
| dc.contributor.nonIdAuthor | Kwak, JH | - |
| dc.type.journalArticle | Article | - |
| dc.subject.keywordPlus | POLARIZATION | - |
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