압전 바이모프의 타원운동을 이용한 정밀 이동기구 개발

Abstract

A new type of precision actuator is developed using piezoelectric bimorphs. This type of actuator is applicable for the flat surface or in-pipe system and can make forward and backward motion. Two bimorphs are linked serially and two different phased voltages are applied to each bimorph. Therefore, The end of the bimorph makes ellipsoidal motion. The device moves by the friction force between the rubber attached at the bimorph end and the inner surface of the pipe. As the results, the driving range of the device is about 0~18Hz and the device guarantees very high linearity at low frequency, 0~1 Hz. The maximum velocity of the device is about 6mm/s at 10Hz. The developed mechanism is very simple and use piezoelectric bimorph. So, it is possible to miniaturize and educe the power consumption.