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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Chemical vapor deposition of an electroplating Cu seed layer using hexafluoroacetylacetonate Cu(1,5-dimethylcyclooctadiene)

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dc.contributor.authorLee, WHko
dc.contributor.authorKo, YKko
dc.contributor.authorByun, IJko
dc.contributor.authorSeo, BSko
dc.contributor.authorLee, JGko
dc.contributor.authorReucroft, PJko
dc.contributor.authorLee, JUko
dc.contributor.authorLee, JeongYongko
dc.date.accessioned2013-03-03T13:35:25Z-
dc.date.available2013-03-03T13:35:25Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-11-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS, v.19, no.6, pp.2974 - 2978-
dc.identifier.issn0734-2101-
dc.identifier.urihttp://hdl.handle.net/10203/78896-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectCOPPER-FILMS-
dc.subjectCARRIER-GAS-
dc.subjectMETALLIZATION-
dc.subjectRESISTIVITY-
dc.subjectTEMPERATURE-
dc.subjectMORPHOLOGY-
dc.subjectPRESSURE-
dc.subjectGROWTH-
dc.subjectVINYLTRIMETHYLSILANE-
dc.subjectINTERCONNECTS-
dc.titleChemical vapor deposition of an electroplating Cu seed layer using hexafluoroacetylacetonate Cu(1,5-dimethylcyclooctadiene)-
dc.typeArticle-
dc.identifier.wosid000172466300040-
dc.identifier.scopusid2-s2.0-0035509139-
dc.type.rimsART-
dc.citation.volume19-
dc.citation.issue6-
dc.citation.beginningpage2974-
dc.citation.endingpage2978-
dc.citation.publicationnameJOURNAL OF VACUUM SCIENCE TECHNOLOGY A-VACUUM SURFACES AND FILMS-
dc.contributor.localauthorLee, JeongYong-
dc.contributor.nonIdAuthorLee, WH-
dc.contributor.nonIdAuthorKo, YK-
dc.contributor.nonIdAuthorByun, IJ-
dc.contributor.nonIdAuthorSeo, BS-
dc.contributor.nonIdAuthorLee, JG-
dc.contributor.nonIdAuthorReucroft, PJ-
dc.contributor.nonIdAuthorLee, JU-
dc.type.journalArticleArticle-
dc.subject.keywordPlusCOPPER-FILMS-
dc.subject.keywordPlusCARRIER-GAS-
dc.subject.keywordPlusMETALLIZATION-
dc.subject.keywordPlusRESISTIVITY-
dc.subject.keywordPlusTEMPERATURE-
dc.subject.keywordPlusMORPHOLOGY-
dc.subject.keywordPlusPRESSURE-
dc.subject.keywordPlusGROWTH-
dc.subject.keywordPlusVINYLTRIMETHYLSILANE-
dc.subject.keywordPlusINTERCONNECTS-
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