Fabrication of PZT thick films on silicon substrates for piezoelectric actuator

Abstract

In recent years, there has been an increased interest in ferroelectric lead zirconate titanate (PZT) films for applications in piezoelectric devices. Many potential applications require a film thickness of about 10 mu m for higher force, better sensitivity and stability. In this study we fabricate lead zirconate titanate (PZT) thick films by screen printing on silicon substrates with a platinum bottom electrode. Various substrates were studied. The longitudinal piezoelectric coefficient, d(33), was measured by the normal load testing method. Breakdown voltage, tan delta, P-E hysteresis loop and permittivity were measured on the PZT thick films. The results are promising for the use of PZT thick films in various applications, for example, in silicon micromachined micro-pump.