반도체 제조 트랙장비의 온라인 스케쥴링 방법On-Line Scheduling Method for Track Systems in Semiconductor Fabrication
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 윤현중 | ko |
| dc.contributor.author | 이두용 | ko |
| dc.date.accessioned | 2013-03-03T11:20:49Z | - |
| dc.date.available | 2013-03-03T11:20:49Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2001-01 | - |
| dc.identifier.citation | 대한기계학회논문집 A, v.25, no.3, pp.443 - 451 | - |
| dc.identifier.issn | 1226-4873 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/78470 | - |
| dc.language | Korean | - |
| dc.publisher | 대한기계학회 | - |
| dc.title | 반도체 제조 트랙장비의 온라인 스케쥴링 방법 | - |
| dc.title.alternative | On-Line Scheduling Method for Track Systems in Semiconductor Fabrication | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 25 | - |
| dc.citation.issue | 3 | - |
| dc.citation.beginningpage | 443 | - |
| dc.citation.endingpage | 451 | - |
| dc.citation.publicationname | 대한기계학회논문집 A | - |
| dc.contributor.localauthor | 이두용 | - |
| dc.contributor.nonIdAuthor | 윤현중 | - |
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