DC Field | Value | Language |
---|---|---|
dc.contributor.author | 이광철 | ko |
dc.contributor.author | 이승섭 | ko |
dc.date.accessioned | 2013-03-03T11:06:32Z | - |
dc.date.available | 2013-03-03T11:06:32Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2002-10 | - |
dc.identifier.citation | 대한기계학회논문집 A, v.26, no.10, pp.2187 - 2193 | - |
dc.identifier.issn | 1226-4873 | - |
dc.identifier.uri | http://hdl.handle.net/10203/78436 | - |
dc.description.abstract | We present a novel method for 3D microfabrication with LIGA process that utilizes a deep X-ray mask in which a micro-actuator is integrated. The integrated micro-actuator oscillates the X-ray absorber, which is formed on the shuttle mass of the micro-actuator, during X-ray exposures to modify the absorbed dose profile in X-ray resist, typically PMMA. 3D PMMA microstructures according to the modulated dose contour are revealed after GG development. An X-ray mask with integrated comb drive actuator is fabricated using deep reactive ion etching, absorber electroplating, and bulk micromachining with silicon-on-insulator (SOI) wafer. 1mm x 1 mm, 20 μm thick silicon shuttle mass as a mask blank is supported by four 1 mm long suspension beams and is driven by the comb electrodes. A 10 μm thick, 50 μm line and spaced gold absorber pattern is electroplated on the shuttle mass before the release step. The fundamental frequency and amplitude are around 3.6 kHz and 20 μm, respectively, for a do bias of 100 V and an ac bias of 20 $V_{p-p}$ (peak-peak). Fabricated PMMA microstructure shows 15.4 μm deep, S-shaped cross section in the case of 1.6 kJ $cm^{-3}$ surface dose and GG development at 35°C for 40 minutes. | - |
dc.language | Korean | - |
dc.publisher | 대한기계학회 | - |
dc.title | 3차원 LIGA 미세구조물 제작을 위한 마이크로 액추에이터 내장형 X-선 마스크 | - |
dc.title.alternative | Deep X-ray Mask with Integrated Micro-Actuator for 3D Microfabrication via LIGA Process | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 26 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 2187 | - |
dc.citation.endingpage | 2193 | - |
dc.citation.publicationname | 대한기계학회논문집 A | - |
dc.identifier.kciid | ART000869695 | - |
dc.contributor.localauthor | 이승섭 | - |
dc.contributor.nonIdAuthor | 이광철 | - |
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