헬리칼 공명 플라즈마에서 축방향의 외부자장이 기판상의 플라즈마 밀도에 미치는 영향Effects of axial external magnetic fields on plasma density on substrate in helical resonator plasma source
- Publisher
- 한국진공학회
- Issue Date
- 1999-05
- Language
- Korean
- Citation
한국진공학회지, v.8, no.2, pp.172 - 179
- Appears in Collection
- EE-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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