DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choi, Si-Kyung | ko |
dc.contributor.author | Jung, DY | ko |
dc.contributor.author | Kweon, SY | ko |
dc.contributor.author | Jung, SK | ko |
dc.date.accessioned | 2013-03-03T08:07:30Z | - |
dc.date.available | 2013-03-03T08:07:30Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-06 | - |
dc.identifier.citation | THIN SOLID FILMS, v.279, no.1-2, pp.110 - 114 | - |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://hdl.handle.net/10203/77900 | - |
dc.description.abstract | The rough grown surface of a diamond film deposited by the hot filament chemical vapour deposition (CVD) method was polished by thermomechanical polishing on a hot iron plate at 1173 K. The surface composition and structure of the polished diamond film were analysed by Raman spectroscopy, Auger electron spectroscopy (AES), thin film X-ray diffraction (XRD) and secondary ion mass spectrometry (SIMS). The graphitization of the near-surface region of the diamond film by the hot iron plate was observed during thermomechanical polishing. At the diamond film/Si interface, beta-SiC was observed during the early stages of polishing, but after prolonged treatment the graphitization of the diamond film occurred rapidly. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA LAUSANNE | - |
dc.subject | DEFECT STRUCTURES | - |
dc.subject | THIN-FILMS | - |
dc.subject | GROWTH | - |
dc.subject | PHASE | - |
dc.title | Surface characterization of diamond films polished by thermomechanical polishing method | - |
dc.type | Article | - |
dc.identifier.wosid | A1996VB37200022 | - |
dc.identifier.scopusid | 2-s2.0-0030168807 | - |
dc.type.rims | ART | - |
dc.citation.volume | 279 | - |
dc.citation.issue | 1-2 | - |
dc.citation.beginningpage | 110 | - |
dc.citation.endingpage | 114 | - |
dc.citation.publicationname | THIN SOLID FILMS | - |
dc.contributor.localauthor | Choi, Si-Kyung | - |
dc.contributor.nonIdAuthor | Jung, DY | - |
dc.contributor.nonIdAuthor | Kweon, SY | - |
dc.contributor.nonIdAuthor | Jung, SK | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | diamond film | - |
dc.subject.keywordAuthor | graphitization | - |
dc.subject.keywordAuthor | hot filament CVD | - |
dc.subject.keywordAuthor | thermomechanical polishing | - |
dc.subject.keywordPlus | DEFECT STRUCTURES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | GROWTH | - |
dc.subject.keywordPlus | PHASE | - |
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