DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jang, BT | ko |
dc.contributor.author | Kwak, DH | ko |
dc.contributor.author | Cha, SY | ko |
dc.contributor.author | Lee, SH | ko |
dc.contributor.author | Lee, Hee Chul | ko |
dc.date.accessioned | 2013-03-03T05:17:52Z | - |
dc.date.available | 2013-03-03T05:17:52Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1998 | - |
dc.identifier.citation | INTEGRATED FERROELECTRICS, v.20, no.1-4, pp.215 - 224 | - |
dc.identifier.issn | 1058-4587 | - |
dc.identifier.uri | http://hdl.handle.net/10203/77398 | - |
dc.description.abstract | We developed a simple method for characterizing high-frequency properties of (Ba,Sr)TiO3 thin film capacitors. This method includes a new fabrication process, a simple circuit model of measurement pattern and an easy procedure to de-embed parasitic components. In this study we successfully fabricated BST capacitors of Pt/ Ba0.7Sr0.3TiO3/Pt/Ti structure on the SiO2 coated Si substrate using a combination of lift-off process, wet etching and Au plating process. Also, we de-embedded parasitic components in the coplanar-type probing pad using two de-embedding patterns. As a result, it was found that the BST film had high dielectric property up to 5 GHz. This microwave property of the BST film is considered to be suitable for DRAM applications. | - |
dc.language | English | - |
dc.publisher | GORDON BREACH PUBLISHING | - |
dc.title | A simple method for high-frequency characterization of (Ba,Sr)TiO3 thin film capacitors | - |
dc.type | Article | - |
dc.identifier.wosid | 000168669700022 | - |
dc.identifier.scopusid | 2-s2.0-0032310065 | - |
dc.type.rims | ART | - |
dc.citation.volume | 20 | - |
dc.citation.issue | 1-4 | - |
dc.citation.beginningpage | 215 | - |
dc.citation.endingpage | 224 | - |
dc.citation.publicationname | INTEGRATED FERROELECTRICS | - |
dc.contributor.localauthor | Lee, Hee Chul | - |
dc.contributor.nonIdAuthor | Jang, BT | - |
dc.contributor.nonIdAuthor | Kwak, DH | - |
dc.contributor.nonIdAuthor | Cha, SY | - |
dc.contributor.nonIdAuthor | Lee, SH | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | DRAM | - |
dc.subject.keywordAuthor | BST | - |
dc.subject.keywordAuthor | dielectric | - |
dc.subject.keywordAuthor | microwave measurement | - |
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