DC Field | Value | Language |
---|---|---|
dc.contributor.author | Jun, KH | ko |
dc.contributor.author | Lim, Koeng Su | ko |
dc.date.accessioned | 2013-03-03T04:57:47Z | - |
dc.date.available | 2013-03-03T04:57:47Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2000-01 | - |
dc.identifier.citation | JOURNAL OF NON-CRYSTALLINE SOLIDS, v.261, no.1-3, pp.268 - 272 | - |
dc.identifier.issn | 0022-3093 | - |
dc.identifier.uri | http://hdl.handle.net/10203/77325 | - |
dc.description.abstract | The microcrystalline silicon/amorphous silicon (mu c-Si:H/a-Si:H) superlattice showed an enhanced vertical,photo- sensitivity (photo-conductivity/dark-conductivity), whereas it reserved a lateral photo-sensitivity nearly unchanged. The film was fabricated by alternating the mixing of SiH4 and HZ in a photo-chemical vapor deposition system. The fact that a high vertical photo-sensitivity and an obvious crystalline volume fraction can be obtained at the same time distinguishes the mu c-Si:H/a-Si:H superlattice from the bulk mu c-Si:H. The change of the vertical dark-conductivity with the sublayer thickness was explained by the change of the a-Si:PI sublayer's electrical conduction property. We think that the thin a-Si:H sublayers play an important role of perturbing a columnar structure of the mu c-Si:H. (C) 2000 Elsevier Science B.V. All rights reserved. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.subject | MICROCRYSTALLINE SILICON | - |
dc.subject | RAMAN-SCATTERING | - |
dc.subject | MULTILAYERS | - |
dc.subject | PHOTOLUMINESCENCE | - |
dc.subject | FILMS | - |
dc.title | Enhanced vertical photo-sensitivity in mu c-Si : H/a-Si : H superlattices | - |
dc.type | Article | - |
dc.identifier.wosid | 000084760200031 | - |
dc.identifier.scopusid | 2-s2.0-0033896142 | - |
dc.type.rims | ART | - |
dc.citation.volume | 261 | - |
dc.citation.issue | 1-3 | - |
dc.citation.beginningpage | 268 | - |
dc.citation.endingpage | 272 | - |
dc.citation.publicationname | JOURNAL OF NON-CRYSTALLINE SOLIDS | - |
dc.contributor.localauthor | Lim, Koeng Su | - |
dc.contributor.nonIdAuthor | Jun, KH | - |
dc.type.journalArticle | Letter | - |
dc.subject.keywordPlus | MICROCRYSTALLINE SILICON | - |
dc.subject.keywordPlus | RAMAN-SCATTERING | - |
dc.subject.keywordPlus | MULTILAYERS | - |
dc.subject.keywordPlus | PHOTOLUMINESCENCE | - |
dc.subject.keywordPlus | FILMS | - |
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