LIGA공정을 이용한 삼면반사체의 제작Fabrication of A 3-Facet Mirror by The LIGA Process
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 오동영 | ko |
| dc.contributor.author | 정동관 | ko |
| dc.contributor.author | 박노열 | ko |
| dc.contributor.author | 장석상 | ko |
| dc.contributor.author | 이승섭 | ko |
| dc.date.accessioned | 2013-03-03T03:17:46Z | - |
| dc.date.available | 2013-03-03T03:17:46Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-08 | - |
| dc.identifier.citation | 한국정밀공학회지, v.17, no.8, pp.172 - 179 | - |
| dc.identifier.issn | 1225-9071 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/76953 | - |
| dc.description.abstract | In this paper a technology for the fabrication of the oblique structure using the LIGA process will be presented. The fabricated microstructure is a tetrahedral 3- facet mirror. The mirror has an equilateral triangular base of hundreds ㎛ length mirror-like three side-facets inclined to the base at 45o and knife edges. Two regular triangles of 45o and tan-12. After development the shaded part of the PMMA the tetrahedral mirror remains, The completed mirror shows excellent aspects of mirror-like facets and knife-edges. By controlling the gap between the mask and the substrate the size of mirror easily can be changed. This mirror would be used as a laser beam splitter for the feedback control of the HDD slider. | - |
| dc.language | Korean | - |
| dc.publisher | 한국정밀공학회 | - |
| dc.title | LIGA공정을 이용한 삼면반사체의 제작 | - |
| dc.title.alternative | Fabrication of A 3-Facet Mirror by The LIGA Process | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 17 | - |
| dc.citation.issue | 8 | - |
| dc.citation.beginningpage | 172 | - |
| dc.citation.endingpage | 179 | - |
| dc.citation.publicationname | 한국정밀공학회지 | - |
| dc.contributor.localauthor | 이승섭 | - |
| dc.contributor.nonIdAuthor | 오동영 | - |
| dc.contributor.nonIdAuthor | 정동관 | - |
| dc.contributor.nonIdAuthor | 박노열 | - |
| dc.contributor.nonIdAuthor | 장석상 | - |
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.