DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, JH | ko |
dc.contributor.author | Choi, HT | ko |
dc.contributor.author | Lee, CW | ko |
dc.contributor.author | Yoon, HS | ko |
dc.contributor.author | Park, BS | ko |
dc.contributor.author | Park, Chul Soon | ko |
dc.date.accessioned | 2013-03-03T02:44:46Z | - |
dc.date.available | 2013-03-03T02:44:46Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-02 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.34, no.2, pp.150 - 153 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/76815 | - |
dc.description.abstract | GaAs pseudomorphic high electron mobility transistors recessed by electron cyclotron resonance (ECR) plasma etching have been investigated. We used a BCl3/SF6 gas mixture to implement the gate recess process. We obtained a uniformity of the threshold voltage to within 50 mV in 3-inch wafers. The GaAs PHEMTs with a 0.2-mu m gate length recessed by the ECR plasma exhibited a minimum noise figure (NFmin) as low as 0.26 dB with an associated gain (G(a)) of 13 dB at 12 GHz. At 18 GHz, the NFmin was 0.47 dB with a Ga of 11.66 dB. These results suggest that the ECR plasma etching process reported here is suitable as a manufacturing process for gate recess of a GaAs PHEMT. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.subject | ALGAAS | - |
dc.subject | HEMTS | - |
dc.subject | GAAS | - |
dc.title | Low-noise AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistor recessed by electron cyclotron resonance plasma etching | - |
dc.type | Article | - |
dc.identifier.wosid | 000078631800010 | - |
dc.identifier.scopusid | 2-s2.0-0033482387 | - |
dc.type.rims | ART | - |
dc.citation.volume | 34 | - |
dc.citation.issue | 2 | - |
dc.citation.beginningpage | 150 | - |
dc.citation.endingpage | 153 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.localauthor | Park, Chul Soon | - |
dc.contributor.nonIdAuthor | Lee, JH | - |
dc.contributor.nonIdAuthor | Choi, HT | - |
dc.contributor.nonIdAuthor | Lee, CW | - |
dc.contributor.nonIdAuthor | Yoon, HS | - |
dc.contributor.nonIdAuthor | Park, BS | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | ALGAAS | - |
dc.subject.keywordPlus | HEMTS | - |
dc.subject.keywordPlus | GAAS | - |
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