가변 스텝 마이크로 액츄에이터의 설계 및 구동특성

Abstract

A new actuating mechanism suitable for a micro positioning device is developed using piezoelectric elements. The actuator can make a step movement of 0.5㎜ up to 3.5㎜. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control based on PID is applied. The other is simply repeating the minimum step movement until a target position is reached. The experimental results for the two method are presented.