IN-SITU MONITORING OF THE RELATIVE DISTRIBUTION OF RADICALS BY A 2-PROBE SYSTEM

Cited 7 time in webofscience Cited 0 time in scopus
  • Hit : 295
  • Download : 0
DC FieldValueLanguage
dc.contributor.authorLEE, PWko
dc.contributor.authorKIM, YJko
dc.contributor.authorCHANG, CSko
dc.contributor.authorChang, Hong-Youngko
dc.contributor.authorMOON, Jko
dc.date.accessioned2013-03-03T00:04:10Z-
dc.date.available2013-03-03T00:04:10Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1995-09-
dc.identifier.citationREVIEW OF SCIENTIFIC INSTRUMENTS, v.66, no.9, pp.4591 - 4594-
dc.identifier.issn0034-6748-
dc.identifier.urihttp://hdl.handle.net/10203/76162-
dc.description.abstractA new technique to determine the relative spatial distribution of radical concentration without Abel transformation is presented. By monitoring spatial light intensities with an optical probe inserted into the plasma, the relative spatial distribution of the radical species is investigated. The relative spatial uniformity of the radical atom is also investigated by normalizing the emission intensity of the radical atoms to the plasma parameters (electron-impact excitation rate coefficient and plasma density). The movable probe technique has a simple configuration and provides accurate information on the relative spatial distribution of radicals in any plasma source. (C) 1995 American institute of Physics.-
dc.languageEnglish-
dc.publisherAMER INST PHYSICS-
dc.subjectOPTICAL-EMISSION SPECTROSCOPY-
dc.subjectPLASMA-
dc.subjectACTINOMETRY-
dc.subjectDISCHARGES-
dc.titleIN-SITU MONITORING OF THE RELATIVE DISTRIBUTION OF RADICALS BY A 2-PROBE SYSTEM-
dc.typeArticle-
dc.identifier.wosidA1995RV67900028-
dc.identifier.scopusid2-s2.0-0041661149-
dc.type.rimsART-
dc.citation.volume66-
dc.citation.issue9-
dc.citation.beginningpage4591-
dc.citation.endingpage4594-
dc.citation.publicationnameREVIEW OF SCIENTIFIC INSTRUMENTS-
dc.contributor.localauthorChang, Hong-Young-
dc.contributor.nonIdAuthorLEE, PW-
dc.contributor.nonIdAuthorKIM, YJ-
dc.contributor.nonIdAuthorCHANG, CS-
dc.contributor.nonIdAuthorMOON, J-
dc.type.journalArticleArticle-
dc.subject.keywordPlusOPTICAL-EMISSION SPECTROSCOPY-
dc.subject.keywordPlusPLASMA-
dc.subject.keywordPlusACTINOMETRY-
dc.subject.keywordPlusDISCHARGES-
Appears in Collection
PH-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 7 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0