CuInSe2 and InxSey thin films mere prepared and characterized for photovoltaic applications. The CuInSe2 films were prepared by the sequential coevaporation of In-Se, Cu-Se, and In-Se from elemental sources. It was possible to obtain a CuInSe2 film on which a thin layer of the CuIn3Se5 phase formed, as shown by AES and XRD analysis. Also, InxSey buffer layers were deposited on the CuIn3Se5/CuInSe2 films in the same coevaporator without breaking the vacuum. The InxSey buffer layer had its lowest resistivity, 3x10(4) Omega.cm at 350 degrees C, when the gamma-In2Se3 phase was obtained. A solar cell fabricated with an Al/ITO/ZnO/In2Se3/CuIn3Se5/CuInSe2/Mo structure yielded an efficiency of 8.12%, which considered to be a high value for a Cu-In-Se system. It is necessary to add Ga to the CuInSe2 films to increase the low open-circuit voltage.