DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, DH | ko |
dc.contributor.author | Park, BS | ko |
dc.contributor.author | Chung, HB | ko |
dc.contributor.author | Lee, JH | ko |
dc.contributor.author | Yoo, Hyung Joun | ko |
dc.contributor.author | Oh, YH | ko |
dc.date.accessioned | 2013-03-02T20:16:27Z | - |
dc.date.available | 2013-03-02T20:16:27Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996-06 | - |
dc.identifier.citation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.29, no.3, pp.317 - 320 | - |
dc.identifier.issn | 0374-4884 | - |
dc.identifier.uri | http://hdl.handle.net/10203/75321 | - |
dc.description.abstract | In this paper, we report the sub-quarter-micron lithography of a KrF excimer laser stepper with a dummy diffraction mask (DDM). A homemade KrF excimer laser stepper (N.A.=0.42, sigma=0.34) was used as the exposure tool, and an L/S-phase-grating-type DDM was adopted. The result for the resolution limit of a conventional mask was 0.34 mu m L/S with a 1.5 mu m depth of focus while that of the DDM was improved to 0.2 mu m L/S with a 0.9 mu m depth of focus. The DDM consist of a 0.5 mu m L/S phase grating, and it enhance not only the resolution but also the depth of focus for the L/S patterns. This result was consistent with a simulation obtained by using a homemade simulator. | - |
dc.language | English | - |
dc.publisher | KOREAN PHYSICAL SOC | - |
dc.title | KrF excimer laser lithography with a dummy diffraction mask | - |
dc.type | Article | - |
dc.identifier.wosid | A1996UR17900009 | - |
dc.identifier.scopusid | 2-s2.0-0030553003 | - |
dc.type.rims | ART | - |
dc.citation.volume | 29 | - |
dc.citation.issue | 3 | - |
dc.citation.beginningpage | 317 | - |
dc.citation.endingpage | 320 | - |
dc.citation.publicationname | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
dc.contributor.localauthor | Yoo, Hyung Joun | - |
dc.contributor.nonIdAuthor | Kim, DH | - |
dc.contributor.nonIdAuthor | Park, BS | - |
dc.contributor.nonIdAuthor | Chung, HB | - |
dc.contributor.nonIdAuthor | Lee, JH | - |
dc.contributor.nonIdAuthor | Oh, YH | - |
dc.type.journalArticle | Article | - |
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