RF Planar Magnetron Sputtering을 이용한 탄성파 소자용 ZnO 압전 박막 제작
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김종완 | ko |
| dc.contributor.author | 한봉명 | ko |
| dc.contributor.author | 박희태 | ko |
| dc.contributor.author | 김경식 | ko |
| dc.contributor.author | 김수용 | ko |
| dc.date.accessioned | 2013-03-02T16:57:24Z | - |
| dc.date.available | 2013-03-02T16:57:24Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1995-03 | - |
| dc.identifier.citation | 새물리, v.8, no.2, pp.177 - 181 | - |
| dc.identifier.issn | 0374-4914 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/74569 | - |
| dc.language | Korean | - |
| dc.publisher | 한국물리학회 | - |
| dc.title | RF Planar Magnetron Sputtering을 이용한 탄성파 소자용 ZnO 압전 박막 제작 | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 8 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 177 | - |
| dc.citation.endingpage | 181 | - |
| dc.citation.publicationname | 새물리 | - |
| dc.contributor.localauthor | 김수용 | - |
| dc.contributor.nonIdAuthor | 김종완 | - |
| dc.contributor.nonIdAuthor | 한봉명 | - |
| dc.contributor.nonIdAuthor | 박희태 | - |
| dc.contributor.nonIdAuthor | 김경식 | - |
- Appears in Collection
- PH-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.