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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

Integration of lot dispatching and AMHS control in a 300mm wafer FAB

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dc.contributor.authorSun, D.-S.-
dc.contributor.authorPark, N.-S.-
dc.contributor.authorLee, Y.-J.-
dc.contributor.authorJang, Y.-C.-
dc.contributor.authorAhn, C.-S.-
dc.contributor.authorLee, Tae-Eog-
dc.date.accessioned2008-09-22T09:32:35Z-
dc.date.available2008-09-22T09:32:35Z-
dc.date.created2012-02-06-
dc.date.issued2005-04-11-
dc.identifier.citation2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence, v., no., pp.270 - 274-
dc.identifier.issn1078-8743-
dc.identifier.urihttp://hdl.handle.net/10203/7391-
dc.languageENG-
dc.language.isoen_USen
dc.publisherIEEE/SEMI-
dc.titleIntegration of lot dispatching and AMHS control in a 300mm wafer FAB-
dc.typeConference-
dc.identifier.scopusid2-s2.0-27644448808-
dc.type.rimsCONF-
dc.citation.beginningpage270-
dc.citation.endingpage274-
dc.citation.publicationname2005 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Advancing Semiconductor Manufacturing Excellence-
dc.identifier.conferencecountryGermany-
dc.identifier.conferencecountryGermany-
dc.contributor.localauthorLee, Tae-Eog-
dc.contributor.nonIdAuthorSun, D.-S.-
dc.contributor.nonIdAuthorPark, N.-S.-
dc.contributor.nonIdAuthorLee, Y.-J.-
dc.contributor.nonIdAuthorJang, Y.-C.-
dc.contributor.nonIdAuthorAhn, C.-S.-
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IE-Conference Papers(학술회의논문)
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