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College of Engineering(공과대학)Dept. of Industrial and Systems Engineering(산업및시스템공학과)IE-Conference Papers(학술회의논문)

An integrated application framework for a cluster tool controller for semiconductor manufacturing

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dc.contributor.authorLee, Tae-Eogko
dc.contributor.authorLee, J.-H.ko
dc.date.accessioned2008-09-22T09:32:23Z-
dc.date.available2008-09-22T09:32:23Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2001-10-15-
dc.identifier.citation8th International Conference on Emerging Technologies and Factory Automation (ETFA 2001), pp.775 - 778-
dc.identifier.urihttp://hdl.handle.net/10203/7390-
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherIEEE-
dc.titleAn integrated application framework for a cluster tool controller for semiconductor manufacturing-
dc.typeConference-
dc.identifier.wosid000176706000116-
dc.identifier.scopusid2-s2.0-0035556986-
dc.type.rimsCONF-
dc.citation.beginningpage775-
dc.citation.endingpage778-
dc.citation.publicationname8th International Conference on Emerging Technologies and Factory Automation (ETFA 2001)-
dc.identifier.conferencecountryFR-
dc.identifier.conferencelocationAntibes-Juan les pins-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorLee, Tae-Eog-
dc.contributor.nonIdAuthorLee, J.-H.-
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