이온빔보조증착법으로 합성한 hexagonal BN막의 hexagonal ring의 배열과 결정성Alignment and lattice quality of hexagonal rings of hexagonal BN films synthesized by ion beam assisted deposition
- Publisher
- 한국진공학회
- Issue Date
- 1999-12
- Language
- Korean
- Citation
한국진공학회지, v.8, no.1, pp.43 - 50
- ISSN
- 1225-8822
- Appears in Collection
- MS-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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