DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Seung Seob | ko |
dc.contributor.author | Ried R.P. | ko |
dc.contributor.author | White R.M. | ko |
dc.date.accessioned | 2013-03-02T13:48:21Z | - |
dc.date.available | 2013-03-02T13:48:21Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1996 | - |
dc.identifier.citation | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, v.5, no.4, pp.238 - 242 | - |
dc.identifier.issn | 1057-7157 | - |
dc.identifier.uri | http://hdl.handle.net/10203/73817 | - |
dc.description.abstract | A micromachined piezoelectric cantilever transducer, which works both as a microphone and as a microspeaker, has been fabricated and tested, The 2000 x 2000 x 4.5 mu m(3) cantilever has a zinc oxide (ZnO) piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited (LPCVD) low-stress silicon nitride, A highlight of the fabrication process, which may also be relevant for other micromachined structures, is the technique for producing a Bat, multilayer cantilever. The measured microphone sensitivity is fairly constant at 3 mV/mu bar in the low frequency range and rises to 20 mV/mu bar at the lowest resonant frequency of 890 Hz. The 3 mV/mu bar sensitivity is the highest reported to date for a microphone with a micromachined diaphragm. When measured into a 2 cm(3) coupler with 4 V(zero-peak) drive, the microspeaker output sound pressure level (SPL) is 75 dB at 890 Hz. It increases to approximately 100 dB SPL at 4.8 kHz with 6 V(zero-peak) drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation. | - |
dc.language | English | - |
dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | - |
dc.subject | CONDENSER MICROPHONE | - |
dc.subject | SILICON | - |
dc.title | Piezoelectric cantilever microphone and microspeaker | - |
dc.type | Article | - |
dc.identifier.wosid | A1996VY41300003 | - |
dc.type.rims | ART | - |
dc.citation.volume | 5 | - |
dc.citation.issue | 4 | - |
dc.citation.beginningpage | 238 | - |
dc.citation.endingpage | 242 | - |
dc.citation.publicationname | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | - |
dc.contributor.localauthor | Lee, Seung Seob | - |
dc.contributor.nonIdAuthor | Ried R.P. | - |
dc.contributor.nonIdAuthor | White R.M. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | CONDENSER MICROPHONE | - |
dc.subject.keywordPlus | SILICON | - |
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