Self-Compensation of PZT Errors in White Light Interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Min-Gu Kang | ko |
| dc.contributor.author | Sang-Yoon Lee | ko |
| dc.contributor.author | Seung-Woo Kim | ko |
| dc.date.accessioned | 2013-03-02T13:35:53Z | - |
| dc.date.available | 2013-03-02T13:35:53Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 1999-01 | - |
| dc.identifier.citation | JOURNAL OF THE OPTICAL SOCIETY OF KOREA , v.3, no.2, pp.35 - 40 | - |
| dc.identifier.issn | 1226-4776 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/73764 | - |
| dc.description.abstract | One of main error sources in white light scanning interferometry is the inaccuracy of scanning mechanisms in that PZT (piezoelectric transducer) micro-actuators are preferably used. We propose a new calibration method that is capable of identifying actual scanning errors directly by analyzing the spectral distribution of sampled interferograms. This calibration provides an effective means of self-compensation for the non-linearity errors caused by PZT hysteresis, enhancing the measurement uncertainty to a level of 5 nanometers over an entire measuring range of 100 ㎛. | - |
| dc.language | English | - |
| dc.publisher | 한국광학회 | - |
| dc.title | Self-Compensation of PZT Errors in White Light Interferometry | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.citation.volume | 3 | - |
| dc.citation.issue | 2 | - |
| dc.citation.beginningpage | 35 | - |
| dc.citation.endingpage | 40 | - |
| dc.citation.publicationname | JOURNAL OF THE OPTICAL SOCIETY OF KOREA | - |
| dc.contributor.localauthor | Seung-Woo Kim | - |
| dc.contributor.nonIdAuthor | Min-Gu Kang | - |
| dc.contributor.nonIdAuthor | Sang-Yoon Lee | - |
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